Micro Mass Flow Meters

Micro mass flow meters deliver highly accurate, direct measurement of very low mass flow rates of gases and liquids using advanced thermal technology.

How They Work

A small heater creates a temperature difference along a micro-channel. As the fluid flows past, it carries away heat. Built-in temperature sensors measure this heat loss, which is directly proportional to the mass flow rate. The entire sensing element is often microfabricated using MEMS technology, making the device extremely compact yet highly sensitive.

Key Advantages

Direct mass flow measurement with exceptional accuracy at very low flow rates
Fast response time for real-time process control
Compact size ideal for space-constrained systems
High sensitivity and reliability thanks to MEMS technology
Suitable for integration into advanced analytical and manufacturing equipment

Common Applications

Pharmaceutical and biotech dosing & mixing
Semiconductor manufacturing (gas flow in CVD, etching, etc.)
Chemical research and laboratory instrumentation
Medical devices and analytical instruments
Environmental monitoring and gas analysis

Micro mass flow meters excel where precision at micro-scale flow rates is essential. Their compact design, fast response, and high accuracy make them indispensable in high-tech manufacturing, research, and process control.

Ultra-Precise • Compact • MEMS-Powered

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SKU: 41500 Categories: Coriolis and Mass Flow, Flow, Flow Meters, Micro, Products Tags: coriolis micro flow meter, high precision micro mass flow meter, low flow coriolis meter, low flow mass flow meter, micro coriolis flow meter, Micro Mass flow meter, micro mass flowmeter, micro motion low flow, miniature mass flow meter, thermal micro mass flow meter Brand: ProFlowUSA

Description

Micro Mass Flow Meters

Micro mass flow meters provide highly accurate, direct measurement of very low mass flow rates of gases and liquids — ideal for precision applications where even tiny variations matter.

How They Work

These meters use thermal mass flow technology. A small heater creates a temperature difference along a micro-channel or sensing element. As the fluid flows past, it carries away heat. The temperature sensors measure this heat loss, which is directly proportional to the mass flow rate. Advanced MEMS (micro-electromechanical systems) technology allows the entire sensing element to be extremely small yet highly sensitive.

Key Advantages

Direct mass flow measurement — no need to convert from volume
Excellent accuracy and repeatability at extremely low flow rates
Compact, lightweight design ideal for space-constrained systems
Fast response time for real-time process control
High sensitivity and durability thanks to MEMS technology

Common Applications

Pharmaceutical and biotech dosing
Semiconductor and electronics manufacturing (gas flow in CVD/etching)
Chemical research and laboratory processes
Medical equipment and analytical instruments
Environmental monitoring and gas analysis

Micro mass flow meters excel where precision at very low flow rates is essential. Their compact size, fast response, and high accuracy make them indispensable in advanced manufacturing, research, and process control.

Ultra-Precise • Compact • MEMS Technology

Additional information

Size	1/4", 3/8", 1/2", 3/4"
Media Type	Gas, Liquid
Pressure Class	< 150LB, <300LB, <600LB, <1500LB, <3000LB
Connections	Compression, Swage
Voltage	24VDC, Battery
Output	4-20MA, Pulse, 0-10 VDC
Communication	RS232, HART
QC Certificate	No, Yes

Specifications

Precision thermal mass flow measurement for dry, clean gases with optional integrated valve control and multiple communication options.

Specification	Details
Measurement Range	0 – 20 SLPM (42.38 SCFH / 1.20 NCMH) for DN6 model
Accuracy	±(2.0 + 0.5% FS)
Repeatability	0.5%
Turn-down Ratio	80:1
Response Time	Fast thermal response (exact time varies by model)
Working Temperature	-10°C to +55°C
Maximum Pressure	0.8 MPa (8 Bar)
Humidity	<95% RH (non-condensing)
Power Supply	4 × AA batteries (LR6) or 5~24 Vdc via USB Type-C
Communication	RS485 Modbus RTU (standard) Optional: LoRa, WiFi, NB-IoT, Bluetooth LE
Display	LCD with resolution 0.01 L/min (instant) / 1 L (accumulated)
Mechanical Connection	1/4″ BSP (or NPT) for MF5706 model
Additional Features	Hi/Low Alarm with visual & audible alert Integrated valve option CE / EN61326 compliant

Compact, accurate, and user-configurable thermal mass flow meter with wireless options — ideal for precise gas measurement in industrial and laboratory settings.

Precision • Wireless Ready • Easy Integration

Accuracy %

Micro mass flow meters offer excellent precision for very low flow rates.
Here’s how they compare to other popular technologies (typical accuracy % of reading).

Flow Meter Type	Typical Accuracy	Visual Comparison
Coriolis Mass Flow Meter	±0.1%
Micro Mass Flow Meter	±0.5%
Electromagnetic (Mag) Meter	±0.5%
Turbine Flow Meter	±0.5%
Ultrasonic Flow Meter	±1.0%
Vortex Flow Meter	±1.0%

Micro mass flow meters provide outstanding ±0.5% accuracy for very low flow rates — ideal when precision at micro-scale is critical.

Ultra-Precise • Low-Flow Specialist • High-Performance Measurement

Installation

Proper installation ensures accurate, reliable measurements and long-term performance of your micro mass flow meter.

Step	Details
Pre-Installation Preparation	Review the manufacturer’s manual for your specific model. Confirm the meter suits your flow rate, fluid type, temperature, and pressure. Gather all necessary tools, adapters, sealants, and safety equipment.
System Shutdown & Site Inspection	Shut down the system and fully depressurize the lines. Clean the installation area and ensure pipes are properly aligned and free of debris. Verify pipe or tubing compatibility with the meter’s connections.
Installing the Flow Meter	Install the meter in the correct orientation (often vertical for best accuracy). Connect securely using appropriate fittings and apply recommended sealants. Ensure sufficient straight pipe length upstream and downstream for a stable flow profile.
Electrical & Communication Connections	Connect the power supply according to the manual (battery or external). Wire any signal outputs or communication lines following the provided diagrams. Ensure all connections are secure and properly insulated.
System Startup, Testing & Calibration	Gradually restart the system and check for leaks at all connections. Verify real-time readings and compare against a known reference flow. Perform calibration as recommended by the manufacturer.
Final Documentation & Maintenance	Record installation details, configuration settings, and calibration data. Schedule regular inspections and maintenance. Train operators on proper use and monitoring of the meter.

Following these steps ensures accurate, reliable performance and helps extend the service life of your micro mass flow meter.

Precise Setup • Accurate Measurement • Long-Term Reliability

Maintenance

Quick answers to common maintenance questions for your wireless flow meter.

Question	Answer
How often should I perform maintenance on my wireless flow meter?	Perform routine maintenance every 3 to 6 months. Also inspect after severe weather or if you notice performance issues.
What should I look for during a visual inspection of the flow meter?	Check for physical damage, cracks, corrosion, loose components, and debris on the sensor, mounting hardware, and communication module.
How do I clean the sensor and connectors of the flow meter?	Gently clean the sensor with a soft, dry cloth. Use compressed air or a dry cloth for connectors. Avoid abrasive materials or harsh solvents.
How can I verify if the flow meter is performing accurately?	Compare measurements against known standards or calibration fluids. Monitor performance data and signal strength to spot discrepancies early.
What steps should I take if I notice reduced signal strength or communication issues?	Check for interference, ensure proper antenna positioning, verify connections and power supply. If issues persist, consult the manual or contact technical support.
When should I replace the batteries in my wireless flow meter?	Replace batteries before they are fully depleted. Many models have low-battery alerts — act on them to avoid data interruptions.
How do I handle software or firmware updates for my flow meter?	Check the manufacturer’s website or manual for updates and follow the provided instructions carefully.
What are the environmental considerations for maintaining a wireless flow meter?	Keep the device within its rated temperature and humidity range. After extreme weather, inspect for damage and clear any debris.
How do I document maintenance activities and performance trends?	Maintain a detailed log of inspections, cleaning, calibrations, repairs, and performance trends to spot recurring issues early.
When should I seek professional help for my flow meter?	Seek professional assistance for persistent issues, complex troubleshooting, or if the meter is critical to operations. Scheduled professional inspections are also recommended for high-value installations.

Regular maintenance keeps your wireless flow meter accurate, reliable, and ready for continuous industrial use.

Proactive Care • Accurate Data • Long-Term Reliability

Q&A

Quick answers to the most common questions about micro mass flow meters.

Question	Answer
What is a micro mass flow meter?	A micro mass flow meter is a highly precise instrument designed to measure the mass flow rate of very small quantities of gases or liquids. It operates on the principle of thermal mass flow measurement, where the flow rate is determined by how much heat is carried away by the flowing fluid. It is commonly used in applications requiring high accuracy and sensitivity.
What are the key advantages of using a micro mass flow meter?	High precision and accuracy at very low flow rates, compact size for integration into small systems, fast response time, no moving parts in many models, and minimal power consumption. These features make them ideal for microfluidics, laboratory, and precision industrial applications.
Are there any disadvantages to using a micro mass flow meter?	Higher cost compared to traditional flow meters, sensitivity to environmental conditions like temperature and pressure changes, need for regular calibration, limited flow range, and potentially complex integration into existing systems.
What types of applications are micro mass flow meters used for?	Pharmaceutical dosing and mixing, semiconductor manufacturing (gas flow in CVD/etching), chemical research, medical devices, environmental monitoring, food & beverage quality control, aerospace, laboratory research, automotive fuel testing, and oil & gas trace gas measurement.
How do micro mass flow meters work?	They use thermal mass flow technology. A heater warms the fluid, and temperature sensors measure the heat carried away. The temperature difference is proportional to the mass flow rate. MEMS technology enables their small size and high sensitivity.
What are the calibration requirements for micro mass flow meters?	Calibration involves comparing the meter’s readings to a known reference flow standard. It should be performed regularly and whenever operating conditions change significantly. Follow the manufacturer’s specific procedures for best results.
Can micro mass flow meters be used in high-pressure or high-temperature applications?	Many standard models have limitations in extreme conditions. Specialized versions may handle higher pressures and temperatures, but always consult the manufacturer’s specifications to confirm suitability for your application.
How do I choose the right micro mass flow meter for my application?	Consider flow rate range, fluid type (gas or liquid), environmental conditions (temperature, pressure, contaminants), size and integration requirements, accuracy needs, and budget. Ensure the meter is compatible with your system and application demands.

Still have questions about micro mass flow meters? Our team is ready to help you select the right solution for your precision needs.

Precision • Compact • High Accuracy

Advantages / Disadvantages

Micro mass flow meters deliver exceptional precision for low-flow applications, but they come with specific considerations.

Advantages

Advantage	Description
High Precision and Accuracy	Deliver extremely accurate measurements of very small flow rates, critical for pharmaceuticals, microelectronics, and research where minor deviations matter.
Miniaturization	Extremely compact design allows easy integration into space-constrained or complex systems without compromising performance.
Fast Response Time	Provide near-instantaneous feedback to flow changes, enabling real-time process control and improved system efficiency.
Excellent Low-Flow Measurement	Ideal for measuring very low flow rates, making them perfect for microfluidics, laboratory experiments, and precision dosing.
No Moving Parts	Many models have no moving parts, resulting in higher reliability, longer lifespan, and reduced maintenance needs.
Minimal Power Consumption	Energy-efficient design is well-suited for battery-powered and portable systems.
MEMS Technology Integration	Leverages micro-electromechanical systems for high performance in a compact, cost-effective package.

Disadvantages

Disadvantage	Description
Higher Cost	Advanced technology and miniaturization make them more expensive than conventional flow meters.
Sensitivity to Environmental Conditions	Performance can be affected by temperature fluctuations, pressure changes, and other environmental factors, often requiring compensation or controlled conditions.
Regular Calibration Required	Needs frequent calibration using specialized equipment to maintain accuracy, which can be time-consuming.
Limited Flow Range	Primarily designed for very low flow rates; not ideal for higher-volume applications.
Complex Integration	Small size and specialized design can make integration into existing systems more challenging.
Maintenance Sensitivity	Sensitive components require careful handling; contamination or damage can quickly affect performance.

Micro mass flow meters are the ideal choice when ultra-low flow precision is required. For higher flow rates or rugged environments, other technologies may be more suitable.

Precision at Micro Scale • Compact Design • Advanced Performance

Applications

Micro mass flow meters deliver ultra-precise measurement of very low flow rates, making them essential across industries where accuracy at micro-scale levels is critical.

Industry	Key Applications & Benefits
Pharmaceutical Industry	Precise dosing and mixing of active ingredients, solvents, and additives. Ensures batch consistency, product quality, and regulatory compliance in drug manufacturing and injectable production.
Chemical Manufacturing	Accurate control of reactants and hazardous chemicals in reactors and mixing systems. Improves yield, reduces waste, and enhances safety during chemical processes.
Semiconductor Industry	Precise regulation of process gases (silane, nitrogen, oxygen) in chemical vapor deposition (CVD), etching, and wafer production for higher yield and quality.
Medical & Biotechnology	Gas flow control in ventilators, anesthesia machines, bioreactors, and lab equipment. Ensures patient safety and precise fluid handling in research and production.
Environmental Monitoring	Measurement of gases and liquids in air quality stations and water treatment systems. Supports accurate pollutant detection and regulatory compliance.
Food & Beverage Industry	Precise ingredient dosing, flavoring, carbonation, and quality control. Maintains product consistency and safety in production lines.
Aerospace & Defense	Monitoring and control of fuel, oxidizers, and fluids in propulsion systems and spacecraft. Critical for performance, reliability, and safety.
Research & Development	Precise fluid handling and data collection in laboratory experiments and prototype development.
Automotive Industry	Fuel injection systems, emissions testing, and fuel efficiency analysis for optimized engine performance.
Oil & Gas Industry	Trace gas measurement, chemical injection, and low-flow monitoring applications where precision is essential.

From pharmaceutical precision dosing to semiconductor wafer production and environmental compliance, micro mass flow meters provide the ultra-accurate, low-flow measurement needed for today’s most demanding processes.

Ultra-Low Flow Precision • Wide Industry Reach • Critical Process Control

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Micro Mass Flow Meters

Micro Mass Flow Meters

How They Work

Key Advantages

Common Applications

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Description

Micro Mass Flow Meters

How They Work

Key Advantages

Common Applications

Additional information

Specifications

Accuracy %

Installation

Maintenance

Q&A

Advantages / Disadvantages

Advantages

Disadvantages

Applications

Download

Drawings

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