Micro Mass Flow Meters

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Micro mass flow meters are specialized flow meters used to measure very low flow rates of fluids or gases, typically on the order of microliters per minute or less. They are often used in research applications and in the development of microfluidic devices, where precise and accurate control of small volumes of fluids is critical.

Micro mass flow meters use a variety of sensing technologies, including thermal, pressure-based, and Coriolis-based sensors. They are typically designed to be small and compact, with low dead volumes and minimal flow disturbances, in order to accurately measure low flow rates.

One common application of micro mass flow meters is in the pharmaceutical and biotech industries, where they are used to accurately dispense and control small volumes of fluids for research and drug development purposes. They are also used in the semiconductor industry for precise gas flow control in the manufacturing of microelectronic devices.

Micro mass flow meters are highly sensitive and precise, but they can also be expensive and require careful calibration and maintenance. They are often used in conjunction with other microfluidic devices, such as micro pumps and micro valves, to create complete microfluidic systems for research and development purposes.


Micro Mass Flow Meters combines microelectromechanical system (MEMS) flow sensor chip technology and computer adaptive technology, to develop the intelligent all electronic gas mass flow meter, the main technical performance is at the international leading level, with high sensitivity, high precision and large range of measurement characteristics:

In view of the industrial environment, electromagnetic compatibility design incorporates a variety of anti-jamming measures.  With a variety of signal output, can through the communication interface to realize network management functions.

This Micro Mass Flow Meters also has its unique superiority in performance, installation and maintenance, which can be widely used in petroleum, gas, chemical, smelting, energy and other fields.

  • Full-scale flow ranges under 3sccm (smlm)
  • Valve orifice design for smooth control at ultra-low flows
  • Field adjustment with multifunction pilot module display interface. 
  • Measured gas
  • Flow rate
  • Engineering units
  • Set zero, span and full scale for each gas independently
  • Primary Standard Calibration & NIST traceability
  • Pre-programmed gases come standard
  • Precision digital PID valve control; no valve tuning or adjustment
  • Networking capability, including two digital relays, totalization, inputs, and display 
Micro Mass Flow Meters Applications suitable for:


  • Precision Measurement & Control
  • Gas Mixing & Blending
  • Ultra Low Flow Control
  • Artificial Atmospheres
  • Research  


Additional information


1/16", 1/8", 5/16", 1/4", 3/8", 1/2"

Media Type

Gas, Liquid

Pressure Class

< 150LB, <300LB, <600LB, <1500LB, <3000LB


Compression, Swage


24VDC, 120VAC, Battery


4-20MA, Pulse, 0-10 VDC



QC Certificate

No, Yes


Flow Application Form



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